5

Mechanisms of Silicide Formation by Reactive Diffusion in Thin Films

Year:
2019
Language:
english
File:
PDF, 8.58 MB
english, 2019
13

Formation of Pt silicide on doped Si: Kinetics and stress

Year:
2013
Language:
english
File:
PDF, 1.11 MB
english, 2013
39

Nanoscale effects on interfacial reactions

Year:
2004
Language:
english
File:
PDF, 453 KB
english, 2004
47

Ni(Pt) alloy silicidation on (100) Si and poly-silicon lines

Year:
2004
Language:
english
File:
PDF, 1.26 MB
english, 2004
48

Three-dimensional atom mapping of boron in implanted silicon

Year:
2009
Language:
english
File:
PDF, 677 KB
english, 2009